Fundamental Principles of Engineering Nanometrology - Richard Leach

Fundamental Principles of Engineering Nanometrology

Richard Leach
pubblicato da Elsevier Science

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Provides a basic introduction to measurement and instruments
Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge