Carta PAYBACK di Mondadori
Su Mondadori Store, con la tua carta PAYBACK ti premi ad ogni acquisto.
Hans H. Gatzen
-
Volker Saile
-
Jurg Leuthold
pubblicato da
Springer Berlin Heidelberg
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Scrivi una recensione per "Micro and Nano Fabrication"
Torna in cima
dai un voto
