Nanoscience and Nanotechnology: NIST Center for Nanoscale Science and Technology (CNST) NanoFab Cleanroom Safety Manual

This safety manual was developed by the NIST CNST Safety Representative and is specifically designed for the NIST CNST NanoFab Cleanroom. This manual was written in compliance with all Federal Regulations and in accordance to OSHA Laboratory Standard, 29CFR 1910.1450, and NFPA 318, Protection of Semiconductor Fabrication Facilities. This document is a reference manual covering the basic operational policies for use of the CNST NanoFab Cleanroom at NIST.

NANOFAB SAFETY POLICY * 1. INTRODUCTION * 2. GENERAL LAB PROCEDURES * 2.1 Access * 2.2 New User Orientation and Safety Training * 2.3 Location * 2.4 Cleanroom Conduct * 2.5 Hours of Operation * 2.6 Security Cameras * 2.7 User Communication * 2.8 NanoFab Governance and Appeals * 3. EQUIPMENT USE * 3.1 Approved Users * 3.2 Equipment Operations * 3.3 Equipment Problems * 4. LABORATORY PRACTICES * 4.1 Visitors * 4.2 User Storage * 4.3 Phones * 4.4 After-Hours Policy * 4.5 Cleanroom Shutdown * 4.6 Safety Glasses/Contact Lenses * 4.7 Cleanroom Alarms/ Evacuation * 4.8 Injured Person Retrieval * 5. CHEMICAL SAFETY * 5.1 Handling/Labeling and Record Keeping * 5.2 Personal Protective Equipment (PPE) * 5.3 Spills * 5.4 Eyewash Stations and Showers * 5.5 Material Safety Data Sheets (MSDS) * 5.6 Approval -5.7 HF Safety * 5.8 Chemical Storage * 5.9 Pregnancy * 5.10 Waste, Disposal, Neutralization/Satellite Accumulation Area * 5.11 Pyrophoric Liquid and Organometallic Safety * 5.12 Piranha Solution Safety * 5.13 Chemical List (See Appendix) * 6. COMPRESSED GAS SAFETY * 6.1 Compressed Gas Delivery Emergency Response Program * 6.2 Hazardous and Non-Hazardous Gases Used * 6.3 Cylinder Leak Check * 6.4 Toxic Gas Cylinder Change-out * 6.5 SCBA Program * 6.6 Highly Toxic Gases Used * 6.7 Toxic Gas Handling and Usage * 7. NANOSCALE MATERIAL SAFETY * 7.1 Overview * 7.2 Nanoparticle Safety Committee * 7.3 Nanoparticle Safety Policy * 8. EMERGENCY SERVICES * 8.1 Fire Response * 8.2 Chemical Spills * 8.3 Medical Emergencies * 9. CONTACTS * 9.1 Staff Directory * 10. CLEANROOM LAYOUT DRAWING * 11. INCIDENT REPORT FORM

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