This book outlines the intrinsic potential of RFMEMS technology with specific focus on 5G mobile communications and services. Commencing with a review of the characteristics of RFMEMS in relation to the specifications of interest for 5G, the book proceeds to develop practical insight concerning the design and development of RFMEMS including case studies of design concepts. Including multiphysics simulation and animations, the book will be essential reading for both academic and industrial researchers and engineers.