Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information
Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities.
Nanotechnology and microsystems manufacturing
FinFET and nanoscale silicide formation
Physical design for high-performance, low-power 3D circuits
Epitaxi, anneals, RTP, and oxidation
Microlithography, etching, and ion implantations
Physical, chemical, electrochemical, and atomic layer vapor deposition
Chemical mechanical planarization
Atomic force metrology
Packaging, bonding, and interconnects
Flexible hybrid electronics
Flat-panel,flexible display electronics, and photovoltaics